Abstract:The lamb wave resonator was designed and prepared on the surface of AlN films through the magnetron sputtering, photolithography, etching, electron beam evaporation and other processes. The frequency and frequencytemperature characteristics of Lamb wave resonator were studied, and the comparison with the cinventional Rayleigh wave resonator was carrie out. The test results show that the resonant frequency and temperature sensitivity of Rayleigh wave resonator are 305.15 MHz, 10.74 kHz/℃ respectively, while Lamb wave resonator has seven resonant frequencies which are 294.630 MHz, 398.125 MHz, 435.625 MHz, 482 MHz, 531.625 MHz, 570 MHz and 613.625 MHz respectively, the corresponding temperature sensitivity are 10.63 kHz/℃, 13.46 kHz/℃, 16.09 kHz/℃, 17.51 kHz/℃, 18.95 kHz/℃, 20.76 kHz/℃, 21.86 kHz/℃ respectively. All the results indicated that the temperature sensitivity of Lamb wave resonator reaches the maximum of 21.86 kHz/℃.