基于 Parylene 膜的法 珀干涉型光纤超声水听器
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重庆市科委自然科学重点基金项目(CSTC,2009BA5072)

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Fabry Perot Interferometric Fiber optic Ultrasonic Hydrophone Based on Parylene Film
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    摘要:

    针对高强度聚焦超声(HIFU)声场测量,提出并研究了一种基于 Parylene膜的法 珀干涉型光纤水听器。采用真空气相沉积法在光纤的端面蒸镀Parylene膜构成光纤水听器的法 珀腔,分析了光纤水听器的传感原理和解调原理,建立了HIFU声场检测的实验系统。实验结果表明,基于 Parylene 膜的法 珀干涉型光纤水听器能准确传感超声信号, 其输出与换能器驱动电压的非线性度小于 0.01,且与聚偏氟乙烯(PVDF)针式水听器的测量结果基本一致。

    Abstract:

    A Fabry Perot interferometric fiber optic hydrophone formed by Parylene coating for measuring high intensity focused ultrasound (HIFU) is presented.The Fabry Perot cavity of the fiber optic hydrophone is formed by coating a Parylene film on the cleaved end of a single mode fiber by the vacuum vapor deposition method.The sensing principle and the demodulation principle of the Fabry Perot interferometric fiber optic hydrophone has been discussed.An experiment system of HIFU acoustic field has been fabricated.The experimental results show that the proposed Fabry Perot interferometric fiber optic hydrophone can accurately sense the ultrasonic signals,the non linearity of the output voltage of the fiber optic hydrophone relative to the voltage applied to the ultrasonic transducer is less than 0.01,and the results sensed by the developed Fabry Perot interferometric fiber optic hydrophone agree with those sensed by the PVDF needle hydrophone.

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张洁,赵纯亮,曾德平,贾平岗,王帅杰,马兹国,王代华.基于 Parylene 膜的法 珀干涉型光纤超声水听器[J].压电与声光,2012,34(3):355-358. ZHANG Jie, ZHAO Chunliang, ZENG Deping, JIA Pinggang, WANG Shuaijie, MA Ziguo, WANG Daihua. Fabry Perot Interferometric Fiber optic Ultrasonic Hydrophone Based on Parylene Film[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2012-09-27
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