A kind of microelectronic packaging materials were prepared by traditional solid state reaction method. The thermal,mechanic and electric properties were measured and the phase and microstructure evolution of the materials were characterized by XRD and SEM.The effect of BaO content on the properties of materials has been studied.The results showed that BaO didn’t influence the main phase of quartz so much,but it could promote the formation of BaO·Al2O3·2SiO2 and inhibit the precipitation of the cristobalite phase. Increasing the content of BaO could improve the dielectric properties of materials to a certain extent.However,the glass network would be gradually destroyed,affecting the mechanical and thermal properties and resulting in the bending strength reduction as well as the thermal expansion coefficient decrease.
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于东英,聂永峰,邓新峰. BaO含量对一种微电子封装材料性能的影响[J].压电与声光,2012,34(3):438-441. YU Dongying, NIE Yongfeng, DENG Xinfeng. Effect of BaO Content on the Properties of a Kind of Microelectronic Packaging Materials[J]. PIEZOELECTRICS AND ACOUSTOOPTICS