In this paper，the concept and method of bias and linearity analysis of measurement system are introduced, the Minitab software is used to analyze the bias and linearity of the frequency response and sensitivity measurement system of MEMS microphone and the concept of complex measurement system has been put forward, and it is effectively analyzed. A method using the whole bias value to correct the measurement system has been discovered and the performance of the improved measurement system has been forecasted by using Minitab software. The reliability of the measured data of MEMS microphone measurement system has been improved greatly.