Abstract:Firstly, the finite element analysis(FEA) method of the propagation properties of SAW resonator has been presented theoretically. Secondly, the modal and harmonic analyses of SAW resonator constructed with ST cut quartz slice have been performed by utilizing ANSYS software. Lastly, the simulation result data have been processed and come to the following conclusion: that the motion track of each particle in the SAW is an ellipse has been obtained by combining the transverse modal displacement and longitudinal modal displacement of each surface node, the velocity of SAW propagating on the ST cut quartz slice has been calculated by the model frequency and relevant wavelength, that the SAW energy is concentrated within the depth of two waves from surface has been obtained by analyzing the node displacement variation with depth, that the resonator has largest response at the SAW frequency has been acquired from the amplitude frequency characteristic graph. These conclusions are mainly identical to the theoretical values, which offer the simulation basis for designing SAW device and studying the SAW sensor.