压电微动平台的改进PI迟滞模型研究
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教育部回国人员科研启动基金资助项目;宁波市自然科学基金资助项目(2011A610138)

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Research on Improved Hysteresis Model of Piezoelectric Micro positioning Stage
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    摘要:

    为了建立既有较高精度又有较快运算速度的压电微动平台迟滞模型,对传统PI迟滞模型进行了改进研究。由于压电微动平台初载曲线前半升程斜率变化较大,而后半升程斜率变化较小,因此,采用非等分域值方法建立了其PI迟滞模型,通过求取所建模型与实测初载曲线误差的最小二范数辨识出了模型的相应参数,实验验证了所建模型的有效性。实验结果表明,在20.7 μm的平台最大位移范围内,模型的最大误差为0.71 μm,平均误差为0.23 μm。

    Abstract:

    The traditional PI hysteresis model is improved as to build both high accuracy and fast computing speed of hysteresis model of the piezoelectric micro positioning stage.Based on the fact that the slopes of the first half of the initial loading curve for the piezoelectric micro positioning stage change much while the slopes of the second half change little,the PI hysteresis model of the stage was established by the non equinterval threshold value. The established model was identified by optimizing the minimum norm of the errors between measured initial load curve and the model.The experimental results show that the maximum error and average error of the model are 0.71 μm and 0.23 μm in the displacement range of 20.7 μm.

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方凡,崔玉国,梁冬泰,李勇.压电微动平台的改进PI迟滞模型研究[J].压电与声光,2014,36(1):69-71. FANG Fan, CUI Yuguo, LIANG Dongtai, LI Yong. Research on Improved Hysteresis Model of Piezoelectric Micro positioning Stage[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2014-01-07
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