Silica nano ceramic was prepared by silica nanoparticle and tape casting process, The result of XRD and SEM showed that crystallization reaction did not happen when the sintering temperature was 850 ℃ or 950 ℃,however α-cristobalite was found at 1 050 ℃,the grain size was increasing along with the increment of sintering temperature, on the other hand the piezoelectric constant were 1.1 pC/N, 1.2 pC/N and 1.4 pC/N with the sintering temperature increased.The dielectric constant and mechanical quality factor were higher at higher sintering temperature, whereas the dielectric losses had no relation with the sintering temperature.