To improve the precision of piezoelectric ceramic actuator in adjusting the length of optical resonant cavity, a driving system of piezoelectric ceramic actuator was designed; meanwhile, in order to improve the hysteresis of piezoelectric ceramic, the hysteresis model was established by using the Duhem model. The hysteresis model has been obtained by using the gradient descent method to identify the model parameters. The actuator was controlled by using the inverse model compensation and PID method. The experimental result indicates that the Duhem model can effectively fit the hysteresis of the actuator, and the maximum error is less than 0.2 μm in a range of 15 μm; and in the compound control, the maximum error of the actuator is nearly 12 nm, this indicates the effectiveness of the compound control method.