In order to reduce the effect of hysteresis nonlinearity of piezoelectric ceramic on the tracking accuracy of the system, the classical PI hysteresis model which can be analyzed inversely is adopted to build the model of the piezoelectric ceramic in this paper. The PI hysteresis inverse model is used in the feedforward control algorithm and the Neural PID feedback control algorithm is designed. The feedforward control algorithm is combined with the Neural PID feedback control algorithm and then the compound control algorithm is attained. Let the feedforward Control algorithm and the compound control algorithm run on the controller and experiment proves that the tracking error of the feedforward control algorithm is 1.256 μm and the tracking error of the compound control algorithm is 0.092 μm. The tracking accuracy has an improvement of 1.164 μm by the compound control algorithm.