ZnO/蓝宝石结构声表面波滤波器试验研究
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总装预研基金资助项目(9140A23070312DZ3602)

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An Experimental Study on SAW Filter with ZnO/Sapphire Structure
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    摘要:

    该文从理论上计算得到了ZnO(a面)/蓝宝石(r面)结构的声表面波相速度和机电耦合系数色散曲线。依据该色散曲线设计了ZnO(a面)/蓝宝石(r面)结构声表面波滤波器。采用在蓝宝石衬底上先制备ZnO薄膜然后再制作芯片结构的方案研制出了声表面波器件样品。研制过程中生长出了a面结构的ZnO薄膜,其中厚膜样品测试得到了3种声波模式,即模式0、1及2,模式0、1和2的频率分别为1 073.79 MHz,1 290.63 MHz和1 572.3 MHz, 因此,间接测得了模式0、1和2的相速度分别为3 865.67 m/s, 4 646.25 m/s和5 660.27 m/s。

    Abstract:

    The dispersion curves (phase velocity and electromechanical coupling coefficient) of ZnO(a plane)/sapphire(r plane) structure are obtained by theoretical calculation. A SAW filter with ZnO/sapphire structure is designed based on the calculating results. The SAW filter prototype is fabricated by depositing ZnO film on sapphire substrate and then fabricating chip. In the process, the aplane ZnO thin film has been grown. Three SAW modes of the thick film sample, named mode 0, mode 1 and mode 2, are measured. The measured center frequency of mode 0 and mode 1 and mode 2 is 1 073.79 MHz, 1 290.63 MHz and 1 572.3 MHz respectively. The measured phase velocity of mode 0 and mode 1 and mode 2 is 3 865.67 m/s, 4 646.25 m/s and 5 660.27 m/s respectively.

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董加和,陈运祥,冷俊林,张显洪,张永川,王岚,王洁. ZnO/蓝宝石结构声表面波滤波器试验研究[J].压电与声光,2015,37(6):954-956. DONG Jiahe, CHEN Yunxiang, LENG Junlin, ZHANG Xianhong, ZHANG Yongchuan, WANG Lan, WANG Jie. An Experimental Study on SAW Filter with ZnO/Sapphire Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-12-16
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