Ultrasonic micromotor gathers a lot of advantages，such as high resolution, good dynamic performance, small volume, compact structure, low cost, high output force, quickly response, high precision and no electromagnetic interference etc. However，it has some shortcomings，such as vertical displacement，lag error, and small travel， especially those shortcomings have many seriously affection on the positioning accuracy and 3D processing because of increasing compensation after electrode loss. Based on ultraprecision 3D platform of piezoelectric motor driver in the paper, its large travel and small step is combined by adopting macroscopicmicrocosmic and doubledirection drive control system. After testing of microprecision worktable, the running curves are obtained. Results show it has good dynamic and steady performance, realizing ultralow speed, fast response, high resolution and high precision of twoway stepping movement. Simultaneously, it has achieved the submicrometer to nanometer positioning accuracy and satisfied the positioning accuracy of microEDM. The research provides significant scientific reference for further development of piezoelectric motor application in ultra precision motion system position precision of the system.