基于六端口反射计的体声波传感器读出电路
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中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001,2012CJMZZ00009);西南科技大学特殊环境机器人技术四川省重点实验室开放基金资助项目(14zxtk01);重庆大学新型微纳器件与系统技术国防重点学科实验室访问学者基金资助项目(2013MS04);中国工程物理研究院电子工程研究所创新基金资助项目(S20141203);西南科技大学研究生创新基金资助项目(14YCX107,14YCX109,14YCX111);国家自然科学基金资助项目(61574131)

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Study on Sixport Reflectometerbased Readout Circuit of BAW Sensor
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    摘要:

    由于体声波传感器具有灵敏度高,准数字量输出,便于集成和工作频率高等特点,使其近几年迅速发展,且因为体声波传感器具有工作频率高的特点,导致其读出电路部分复杂,不易集成,致使体声波传感器的实用性不高。为推进体声波传感器的实用化,该文提出一种基于六端口反射计的体声波传感器读出电路代替使用矢量网络分析仪的原创性设想。采用Agilent公司的射频仿真软件Advanced Design System初步验证了基于六端口反射计的体声波传感器读出电路的可行性,并给出了满足薄膜体声波谐振器的射频输出信号检测要求的六端口网络的电路设计。

    Abstract:

    The bulk acoustic wave (BAW) sensors are developed rapidly in recent ten years, for which have high sensitivity, quasi digital output, integrality and high operating frequencies. Due to the characteristic of high operating frequency, the readout circuit of the BAW sensor is complex and not easy to be integrated, which leads to the result that BAW sensors haven′t been used in our life. In order to promote the practicality of BAW sensors, an original idea that uses a sixport reflectometerbased readout circuit of BAW sensor instead of the vector network analyzer is proposed in this work. The feasibility of the sixport reflectometerbased readout circuit of BAW sensor has been verified by using the RF simulation software (Advanced Design System) of Agilent company, and a circuit design scheme of the sixport network which is required by the radio frequency output signal detection of FBAR is given.

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黄振华,高杨,蔡洵,赵俊武.基于六端口反射计的体声波传感器读出电路[J].压电与声光,2015,37(6):1066-1070. HUANG Zhenhua, GAO Yang, CAI Xun, ZHAO Junwu. Study on Sixport Reflectometerbased Readout Circuit of BAW Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2015-12-16
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