This paper focuses on the surface acoustic wave propagation property in the Diamond/AlN/SiO2 multilayered structure. The finite element model is established and simulated by the COMSOL software. The phase velocity dispersion curve and the electromechanical coupling coefficient dispersion curve are obtained based on the simulation results. The dependences of the surface acoustic wave propagation property on the AlN film thickness, SiO2 film thickness and the Al electrode film thickness are analysised.