In order to further expand the application fields of PZT micropumps and facilitate them to be better integrated in the microfluidic chip, series of PZT micropumps based on solid Polydimethylsiloxane (PDMS) material are investigated experimentally in this paper. For improving the working performance of PZT micropump to the maximum extent, the rational structure adjustment and design are used, including the adjustment of PZT actuator’s support mode, the optimal design of series and parallel structure of micropump chambers and valve structure, etc. In the lab, the single chamber micropump, double chambers micropump with series and parallel structure were fabricated using PDMS and PMMA, respectively. And the working performances of related prototypes were tested and compared.The test results show that the constructing PZT micropump with good working performance based on PDMS is feasible by reasonable structure design. Under voltage of 90 V, frequency of 80 Hz, the output flow rate of PDMS dual chambers micropump with series structure can reach 21 mL/min, output backpressure can reach 10 kPa. However, comparing with the PMMA micropumps, the comprehensive performances of PDMS micropumps, including output flow rate, backpressure, still have nearly 30% performance gap.