压电微动平台的改进PID控制
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国家自然科学基金资助项目(51175271);教育部留学回国人员科研启动基金资助项目;浙江省高等学校中青年学科带头人学术攀登基金资助项目(Pd2013091)

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Improved PID Control of Piezoelectric Micropositioning Stage
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    摘要:

    为使压电微动平台具有良好的静动态特性,即响应快,超调量小,无振荡及稳态误差小,采用比例、积分、微分(PID)控制法来对其进行定位控制。将常规PID控制中积分环节的矩形积分改进为梯形积分,以提高压电微动平台的控制精度;采用微分分离法对常规PID控制中的微分环节进行改进,以使压电微动平台在具有良好稳定性的情况下,具有很快的响应速度。实验验证了压电微动平台改进PID控制的有效性,结果表明,压电微动平台对4 μm阶跃参考位移的响应时间为0.05 s,输出略有超调,但无振荡,且稳态误差几乎为0;在变幅值三角波及任意波形参考输入作用下,压电微动平台的输出可很好地跟踪输入。

    Abstract:

    In order to get better static and dynamic characteristics of the piezoelectric micropositioning stage, i.e. fast response, small overshoot, no oscillation, small steady state error, a PID controller of the stage is designed. The integral part in the conventional PID controller is improved into the trapezoidal integral to increase the control precision of the stage. The differential part in the conventional PID controller is improved by the differential separation method to get good stability and fast response speed simultaneously. The effectiveness of the improved PID control for the stage has been verified experimentally. The results show that the response time of the stage is 0.05 s at a desired step signal of 4 μm, the response has overshoot slightly but has no oscillation, and the steady state error is almost zero. The output of the stage can well track the input even in the triangle wave of variable amplitude and the arbitrary waveform.

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蔡成波,崔玉国,蔡永根,李勇.压电微动平台的改进PID控制[J].压电与声光,2016,38(3):441-444. CAI Chengbo, CUI Yuguo, CAI Yonggen, LI Yong. Improved PID Control of Piezoelectric Micropositioning Stage[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2016-05-31
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