Abstract:In order to get better static and dynamic characteristics of the piezoelectric micropositioning stage, i.e. fast response, small overshoot, no oscillation, small steady state error, a PID controller of the stage is designed. The integral part in the conventional PID controller is improved into the trapezoidal integral to increase the control precision of the stage. The differential part in the conventional PID controller is improved by the differential separation method to get good stability and fast response speed simultaneously. The effectiveness of the improved PID control for the stage has been verified experimentally. The results show that the response time of the stage is 0.05 s at a desired step signal of 4 μm, the response has overshoot slightly but has no oscillation, and the steady state error is almost zero. The output of the stage can well track the input even in the triangle wave of variable amplitude and the arbitrary waveform.