A micro piezoelectricelectromagnetic vibration energy harvester is designed to collect the widespread vibration energy. The effect of the system design parameters on the output power is investigated. The electricity generation principle of the vibration energy harvester is discussed and the calculation model is established. The relationship between the output power of micro piezoelectricelectromagnetic vibration energy harvester and the height of induction coil is analyzed based on the established energy transformation model. The micro fabrication process is explored to fabricate the micro compound energy harvester prototype.