基于声表面波微流转换微器件研究
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常州工学院科研基金资助项目(YN1404);江苏省大学生创新基金资助项目(201511055039X);常州工学院大学生创新基金资助项目(J140029);浙江省重点学科基金资助项目(Xkl11077)

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A Microdevice for Microfluidic Transformation Based on Surface Acoustic Wave
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    摘要:

    提出了压电基片上液滴转换为微通道内微流体的方法。在128°YX-LiNbO3基片上采用微电子工艺制作两叉指换能器,软光刻工艺制作聚二甲基硅氧烷(PDMS)微通道,镂空印刷电路板,内嵌压电子器件和微通道。两叉指换能器激发声表面波控制液滴与带细孔钢针的接触时间,实现一定量的微流转换。当两叉指换能器上电信号切换时间为9.667 s,水微流体输运速度为0.365 μL/s时,微流转换量为3.525 μL。

    Abstract:

    A method for transforming a droplet on a piezoelectric substrate into microfluid in a microchannel was presented and a microdevice for transforming the droplet was fabricated. The microdevice was comprised of a piezoelectric subdevice with two interdigital transducers on 128° YXLiNbO3 substrate, a poly(dimethylsiloxane)(PDMS) microchannel embedded into a printed circuit board and a steel needle with a small hole. The printed circuit board was hollowed out for embedding the piezoelectric subdevice and the PDMS microchannel using hollowedout technology.Surface acoustic waves excited by the two interdigital transducers on the piezoelectric subdevice were used to control the contact time of the droplet to the steel needle and then the volume of transformed microfluid. Transforming experiments of a water droplet into microfluid in the microchannel were done. Results showed that the droplet on the piezoelectric substrate could be successfully transformed into the microfluid in the microchannel, and the transformed volume was relied on the switching time of the electric signal applied to the two interdigital transducers. When the switching time was 9.667 s and fluid velocity was 0.365 μL/s, the transformed volume was 3.525 μL.

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章安良,张小权,胡文艳,付相庭.基于声表面波微流转换微器件研究[J].压电与声光,2016,38(4):515-518. ZHANG Anliang, ZHANG Xiaoquan, HU Wenyan, FU Xiangting. A Microdevice for Microfluidic Transformation Based on Surface Acoustic Wave[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2016-08-03
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