Abstract:An ultrasonic planar motor driven by the threephase vibration modal based on Hshaped stator was proposed in this paper. Suppose the four bulges located in the xOy plane at the ends of two longitudinal rods of Hshaped horizontal plate are used as the driving feet of the stator, the 1st longitudinal mode, 2nd inplane bending mode and 2nd outplane bending modes of Hshaped stator were used as working modes, which were employed to make the motor drive ends run in ellipse trajectories along the yOz and xOz planes to push the slider to do linear motion alternately along x and y directions. The principle of the motor was introduced, and the motion equation for drive end was derived. A frequency consistency optimization finite element analysis(FEA) model for the Hshaped stator was built to calculate the frequency response characteristics, driver particle vibration response and the movement regulation characteristics. An assemble structure was designed for the motor. The vibration simulations for the stator were carried out, which showed that the drive ends’ amplitude were up to micron level along the x, y, z directions and the motor’s speed at x, y directions as well as the output powier could be regulated by moderating either the driving voltage or the phase angle. The proposed motor has wide application prospects.