A novel metallization process for voltage dependent resistor based on ZnO ceramics has been realized by using the directcurrent magnetron sputtering method in this work. The threelayer electrode film(NiCr/Cu/Ag) structure was used to achieve better mechanical and electrical performance. Compared with the traditional silver baking technology, the magnetron sputtering has advantages of environment friendly process, thinner and controllable thickness of the electrodes, and better adhesion to the substrate. The results show that the film adhesion has been increased from 9.7 MPa to 13.9 MPa, the nonlinear coefficient and the breakdown voltage of the varistor has been increased by 45.5% and 5.6% respectively, and the leakage current is decreased about 55%. The sputtered electrodes also can improve the reliability of samples by reducing the change ratio of nonlinear voltages at an environment of 125 ℃ after 100 h from 1.32% to 0.61%. The electrical properties, mechanical properties and reliability of the three layer film electrode prepared by magnetron sputtering method are much better than that of the silver electrode created by silver sintering, and is promising in voltage dependent resistor application.