Abstract:According to the anisotropic etching characteristics of quartz crystal, a novel microresonator with two double W shaped crosssection beams was designed. The side well gradient was improved by setting two deep grooves on both sides of the grooves to improve the electric field excitation efficiency. The simulation result showed that the piezoelectric force was improved by 58% comparing to the resonator with two H shaped crosssection beams. Two kinds of resonators were successfully manufactured on a quartz crystal wafer with diameter of ?50 cm. The experimental results showed that the Q factor and admittance of the new resonator were increased from 2 387、2 143 ns to 2 648、2 346 ns, respectively, and the motional impedance was decreased from 548 kΩ to 417 kΩ.