Thin film bulk acoustic wave resonator(FBAR) filter has many advantages of small size, high performance, good consistency and manufacturability. The related products have been widely used in the mobile communications market. Based on the basic principle of FBAR technology and the structure of the device, the present situation and development trend of FBAR technology are discussed in this paper. It is indicated that the future of FBAR filter technology will be developed to the direction of broadband, high power, high temperature stability and miniaturization.
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徐学良, 陆玉姣, 杨柳, 杜波, 蒋欣, 马晋毅.薄膜体声波滤波器的发展现状[J].压电与声光,2017,39(2):163-166. XU Xueliang, LU Yujiao, YANG Liu, DU Bo, JIANG Xin, MA Jinyi. The Stateoftheart of Film Bulk Acoustic Wave Resonators Filter[J]. PIEZOELECTRICS AND ACOUSTOOPTICS