This paper presents the design and fabrication of highfrequency, siliconbased ultrasonic atomizer which has the selfaligned fluid path. With the aid of finite element analysis software, we simulated and analyzed the characteristics of the device systematically .The characteristics of impedance , displacement and stress distributions at a certain resonant frequency, and displacement of the amplitude transformer of each part changing with the time are also obtained after the voltage of 30 V is applied to the device. The results show that the simulation agrees with the design. Finally, we fabricate a siliconbased ultrasonic atomizer with the resonant frequency of 1 MHz using MEMS technology. All these works have paved the way for the further testing.