用FPGA实现二维压电扫描镜的磁滞补偿
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国家预研基金资助项目(51302060109)

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Hysteresis Compensation of Twodimensional Piezoelectric Scanning Mirror Based on FPGA
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    摘要:

    针对二维压电扫描镜中压电陶瓷的磁滞效应,根据Madelung规则和汝长海等的理论建立模型,采用精确计算目标偏转后位置对应的输出电压方法,补偿磁滞带来的扫描角度非线性问题。首先测得主磁滞环的电压位移曲线,存入FLASH中构造磁滞对应表;然后,利用现场可编程门阵列(FPGA)具有的强大时序处理能力和高速运算能力精确地进行算法处理,补偿压电陶瓷的磁滞效应;最后,通过D/A模块输出结果,配合外围电压放大电路控制扫描镜的精确偏转。测试平台主要由HeNe激光器、扫描镜、位置敏感探测器(PSD)和NI数据采集卡等搭建而成,用LabVIEW编写测试程序,可以直接测量扫描镜的偏转角度信息。校正前压电扫描镜偏转角度的最大误差为2.5 mrad,开环补偿算法校正后成功地将偏转误差控制在0.3 mrad内,磁滞效应的校正取得了理想的效果。

    Abstract:

    In order to compensate the hysteresis effect of piezoelectric ceramics in the twodimensional piezoelectric scanning mirror, a model based on the Madelung rule and the theory of Ru Changhai is established. With the method of accurately calculating the output voltage corresponding to the position after the deflection, the scanning angle nonlinearity problem caused by the hysteresis is handled. First we need to measure the main hysteresis loop of voltageposition curve and store it in the FLASH memory to construct the corresponding hysteresis table. Then by taking the advantage of strong timing and highspeed computing power of FPGA, the piezoelectric hysteresis effect of piezoelectric ceramics can be accurately compensated. Finally, through the DA module output and the external voltage amplifier circuit, the FPGA can precisely control the deflection of the scanning mirror. The test platform is mainly composed of HeNe laser, scanning mirror, position sensitive detector (PSD) and NI data acquisition card. The LabVIEW programming can be used in the test platform to directly measure the deflection angle information of scanning mirror. The maximum error of the deflection angle of the piezoelectric scanning mirror before correction is 2.5 mrad while it is less than 0.3 mrad after the openloop compensation algorithm correction. The results show that the proposed algorithm can effectively compensate the hysteresis effect.

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梁增基,陈四海,罗栋.用FPGA实现二维压电扫描镜的磁滞补偿[J].压电与声光,2018,40(1):28-32. LIANG Zengji, CHEN Sihai, LUO Dong. Hysteresis Compensation of Twodimensional Piezoelectric Scanning Mirror Based on FPGA[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-02-08
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