基于压电驱动的多指微操作工具及实验研究
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国家自然科学基金资助项目(61673287,61433010);国家“八六三”计划基金资助项目(2015AA042601)

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Experimental Study on Piezoelectric Driven Microoperating Actuator With Multifingered Structure
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    摘要:

    针对目前微纳操作对微纳操作工具的需求,设计并制造了一种结构简单、柔性模块化、高精度的压电驱动的多指微操作工具。通过实验验证了该多指微操作工具在单指、双指及三指工作模式下均能良好地完成相应的微纳操作,操作成功率在85%以上,夹持范围为10~800 μm。通过改变执行末端,调整操作策略,可完成对不同尺寸、材质、结构的微球的拾取与释放。同时,使用多指微操作工具完成微球组装与超显微成像微球操作实验,证明了该操作工具具有重要的实际应用意义。

    Abstract:

    According to the demands of micro-manipulation tools in the field of micro-nano manipulation, a modular multifinger micro-operating tool with simplestructure, highflexibility and highprecision was designed and fabricated. Each finger in the actuator was driven by piezoelectric ceramic actuator. The experiments on the multifinger microoperating actuator under the singlefinger, doublefinger and triplefinger working modes were carried out to verify the abilities of manipulating various microtargets with sizes ranging from 10 SymbolmA@m to 800 SymbolmA@m, and the success rate of more than 85% was achieved. The pickup and release of microspheres with different sizes, textures and structures can be completed by changing the endeffectors and adjusting the operating strategy. At the same time, the experiments of the microsphere selfadhesive assembly and the microsphere operation of ultramicroscopic were carried out by using multimeans microoperation tool, which proved that the operation tool has important practical application significance.

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孟凯,陈涛,杨湛,刘会聪,孙立宁.基于压电驱动的多指微操作工具及实验研究[J].压电与声光,2018,40(1):42-46. MENG Kai, CHEN Tao, YANG Zhan, LIU Huicong, SUN Lining. Experimental Study on Piezoelectric Driven Microoperating Actuator With Multifingered Structure[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-02-08
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