The piezoelectric film was prepared through adding the different mass fractions(30%, 50%, and 70%) of BaTiO3 nanoparticles into PDMS mixture solution, uniformly coating the mixture on the surface of the clean silicon wafer for spincoating treatment, and heat curing by using the spincoating technique. The polarization treatment of the piezoelectric film was carried out. The surface of the film and BaTiO3 powder were analyzed by SEM and XRD. The experimental results showed that the BaTiO3 distribution was relatively uniform in the film, and the BaTiO3 nanoparticle was the tetragonal phase. An vibration energy harvesting test system were designed to test and analyze the output open circuit voltage and power supply capacity of the piezoelectric film, the output characteristics of piezoelectric films were studied by single cantilever vibration and exciter knocking. The peaktopeak value of the output voltage of the piezoelectric thin film was highly consistent with the specific gravity of BaTiO3. When the specific gravity was 70%, the output voltage was the highest, and the corresponding peaktopeak values was 3.50 V respectively.