黄湘俊(1988-),男,湖南省人,硕士,主要从事压电MEMS技术及相关器件的研发、设计与应用工作。E-mail:15153313656@163.com。
黄湘俊,邸啸,刘娅,李鑫,易拥洁,吴鹏程,安兴,朱鑫.基于Al0.8Sc0.2N压电薄膜MEMS声波器件的研制[J].压电与声光,2022,44(3):397-402. HUANG Xiangjun, DI Xiao, LIU Ya, LI Xin, YI Yongjie, WU Pengcheng, AN Xing, ZHU Xin. Development of MEMS Acoustic Wave Device Based on Al0.8Sc0.2N Piezoelectric Thin Film[J]. PIEZOELECTRICS AND ACOUSTOOPTICS
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