Q值横向激发体声波谐振器的设计与制备
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张帅(1998-),男,江苏省徐州市人,硕士生。

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国家自然科学基金资助项目(61701195)

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Design and Preparation of High-Q XBARs
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    摘要:

    随着5G移动通信时代的发展,射频前端(RF front-ends)的滤波和信号处理迫切需要高频大带宽的声学谐振器。横向激发体声波谐振器(XBAR)具有超高的工作频率和超大的机电耦合系数(k2),但其品质因数(Q)值不高,阻碍了其在射频前端中的应用。该文提出了一种基于ZY切铌酸锂(LiNbO3)的XBAR谐振器,通过有限元(FEM)仿真对谐振器进行了优化设计,并在微机电系统(MEMS)工艺下对谐振器进行加工。该文所制备的横向激发体声波谐振器A1模式的谐振频率为4.72 GHz,k2=26.9%,Q3 dB为384,温度频率漂移系数为-60.5×10-6/℃。A3模式的谐振频率为13.5 GHz,k2=4.4%。

    Abstract:

    With the adventof the fifth generation(5G) mobile communication era, there is an urgent demand for high-frequency and large-bandwidth acoustic resonators for RF front-end filtering and signal processing. The laterally excited bulk wave resonator (XBAR) has garnered significant attention from researchers due to its ultra-high operating frequency and substantial electromechanical coupling coefficient(k2). However, XBARs suffer from alow quality factor (Q), impeding their application in RF front-ends. This paper proposes XBARs based on ZY-cut lithium niobate (LiNbO3). Resonator designs were optimized using the finite element method, and resonators were fabricated using micro-electro-mechanical systems. The resulting XBAR exhibiteda resonant frequency of 4.72 GHz, k2 value of 26.9%, Q3 dB value of 384, and temperature coefficient of frequency of -60.5×10-6/℃ for the A1 mode, along with a resonant frequency of 13.5 GHzand k2 value of 4.4% for the A3 mode.

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张帅,俞振一,郭瑜,孙宗琴,傅肃磊,许志斌,王为标.高Q值横向激发体声波谐振器的设计与制备[J].压电与声光,2024,46(2):154-158. ZHANG Shuai, YU Zhenyi, GUO Yu, SUN Zongqin, FU Sulei, XU Zhibin, WANG Weibiao. Design and Preparation of High-Q XBARs[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2023-12-11
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  • 在线发布日期: 2024-04-19
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