低频小型化兰姆波谐振器的研究
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叶昶裕(2000-),男,江西省上饶市人,硕士生。

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国家自然科学基金资助项目(U1430102)

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Research on Low-Frequency Miniaturized Lamb Wave Resonator
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    摘要:

    针对低频声学器件的小型化、大带宽问题,该文基于Y切-铌酸锂压电薄膜激发了反对称A0兰姆波模式,并采用有限元法对A0模式进行了结构设计与理论分析。研究了铌酸锂切型、电极材料、金属化比及膜层厚度变化对声速和机电耦合系数等性能的影响。结果表明,特定结构下,与常规声表面波相比,A0模式兰姆波声速较小,机电耦合系数较大,有利于低频声学滤波器小型化设计。通过研究不同结构对谐振器A0模式兰姆波的横向模态的影响,实现了杂波抑制。

    Abstract:

    In pursuit of overcoming challenges hindering the miniaturization of low-frequency acoustic devices with extensive bandwidth, this study investigated the excitation of the antisymmetric A0 Lamb wave mode utilizing a Y-cut lithium niobate piezoelectric film. The finite element method was then used to examine the structural design and conduct a theoretical analysis of the A0 mode. An assessment of various factors including lithium niobate cutting type, electrode material, metallization ratio, and film thickness variations on the acoustic velocity and electromechanical coupling coefficient revealed that the A0 mode Lamb wave exhibiteda lower acoustic velocity and larger electromechanical coupling coefficient compared to the conventional surface acoustic wave within a specific structure.This characteristic is advantageous for the miniaturization of low-frequency acoustic filters. Furthermore, we investigated the impact of different structures on the transverse mode of the resonator A0 mode Lamb wave to achieve clutter suppression.

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叶昶裕,肖强,陈正林,董加和,米佳,鲍景富.低频小型化兰姆波谐振器的研究[J].压电与声光,2024,46(2):174-178,183. YE Changyu, XIAO Qiang, CHEN Zhenglin, DONG Jiahe, MI Jia, BAO Jingfu. Research on Low-Frequency Miniaturized Lamb Wave Resonator[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2023-12-14
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  • 在线发布日期: 2024-04-19
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