低温度敏感度谐振式压力传感器设计与仿真
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李光贤(1998-),男,云南省曲靖市人,硕士生。

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国家重点研发计划项目“飞机PHM系统用传感器生产及批量测试平台”(2022YFB3206504)

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Design and Simulation of a Low-Temperature Sensitive Resonant Pressure Sensor
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    摘要:

    为降低材料杨氏模量温度漂移和热应力对谐振式压力传感器温度漂移的影响,该文设计了一种基于Si-SiO2复合H形谐振梁和双谐振器结构的低温度敏感度谐振压力传感器。通过有限元仿真软件COMSOL对传感器进行仿真验证。结果表明,在0~350 kPa内传感器灵敏度可达21.146 Hz/kPa,-50~125 ℃内零点温度漂移低至0.2 Hz/℃。与全硅结构相比,灵敏度温度漂移由339×10-6/℃降低至14.1×10-6/℃,可适应工作温度范围较高的环境。

    Abstract:

    To reduce the influence of the change in Young’s modulus with changes in temperature and thermal stress on the temperature drift of a resonant pressure sensor, a low-temperature-sensitivity resonant pressure sensor based on a Si-SiO2 composite H-shaped resonant beam and double resonator structure was designed. The finite element simulation software COMSOL was used to simulate the sensor, and the results showed that the sensitivity of the sensor could reach 21.146 Hz/kPa in the range of 0-350 kPa, and the zero temperature drift in the range of -50 ℃ to +125 ℃ was as low as 0.2 Hz/℃. Compared with anall-silicon structure, the sensitivity temperature drift was reduced from 339×10-6/℃ to 14.1×10-6/℃, which could be adapted to anenvironment with a high operating temperature range.

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李光贤,黄晶,袁宇鹏,杨靖,李春洋,张祖伟,龙帅.低温度敏感度谐振式压力传感器设计与仿真[J].压电与声光,2024,46(2):202-206. LI Guangxian, HUANG Jing, YUAN Yupeng, YANG Jing, LI Chunyang, ZHANG Zuwei, LONG Shuai. Design and Simulation of a Low-Temperature Sensitive Resonant Pressure Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-01-03
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  • 在线发布日期: 2024-04-19
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