独立敏感式MEMS热膨胀流陀螺的机理研究
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刘珺宇(2000-),男,河北省唐山市人,硕士生。

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国家自然科学基金资助项目(61771060);北京市教育委员会科研计划项目资助(23JD0003);北京市新世纪百千万人才工程培养资助项目(2019A20);北京市重点实验室开放课题资助项目(2023202109);北京信息科技大学促进高校分类发展项目(20230416);现代测控技术教育部重点实验室资助(2023202101);北京信息科技大学北京市传感器重点实验室资助(2023202108);北京信息科技大学学科与研究生教育校内项目(20230403)

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Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope
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    摘要:

    提出了一种新型独立敏感式微机电系统(MEMS)热膨胀流陀螺并对其敏感机理进行了研究。通过COMSOL创建了该结构的三维模型,并使用有限元方法对其敏感结构的温度场进行了计算。结果表明,在加热器功率为50 mW,角速度为-10~10 rad/s时,该陀螺的温度灵敏度为0.224 K·(rad·s-1)-1,非线性度为2.37%,具有陀螺效应,且灵敏度为1.8 mV·(rad·s-1)-1,非线性度为2.06%。该陀螺具有灵敏度高及工艺简单等特点,为后续结构优化提供了理论依据。

    Abstract:

    In this paper, a new independently sensitive micro-electromechanical system (MEMS) thermal expansion-flow gyroscope is proposed and its sensitivity mechanism is revealed. A three-dimensional model of the structure was created using the COMSOL multiphysics simulation software and finite-element calculations of the temperature field of its sensitive structure were performed. The computational results show that at a 50 mW heater power and an angular-velocity variation range of -10 rad/s-10 rad/s, this gyro has a gyroscopic effect with a temperature sensitivity of 0.224 K·(rad·s-1)-1 and a nonlinearity of 2.37%, and a sensitivity of 1.8 mV·(rad·s-1)-1 and a nonlinearity of 2.06%. This gyro has a high sensitivity and simple process. In addition, this study lays a theoretical basis for subsequent structure optimizations.

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刘珺宇,朴林华,佟嘉程,马炫霖.独立敏感式MEMS热膨胀流陀螺的机理研究[J].压电与声光,2024,46(2):207-212. LIU Junyu, PIAO Linhua, TONG Jiacheng, MA Xuanlin. Research on the Mechanism of an Independent Sensitive MEMS Thermal Expansion-Flow Gyroscope[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2023-10-09
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  • 在线发布日期: 2024-04-19
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