面内传播方向对SAW滤波器性能的影响研究
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1.重庆邮电大学 光电工程学院,重庆 400065 ;2.电子科技大学 重庆微电子产业技术研究院,重庆 401332 ;3.电子科技大学 电子科学与工程学院,四川 成都 611731

作者简介:

朱建宇(1998-),男,江西省新余市人,硕士生。帅垚(1983-),男,副教授,博士

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四川省科技计划基金资助项目(2020YFJO02)

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Influence of In-Plane Propagation Direction on the Performance of Surface Acoustic Wave Filters
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Affiliation:

1.School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing 400065 , China ;2.Chongqing Microelectronics Industry Technology Research Institute, University of Electronic Science andTechnology of China, Chongqing 401332 , China ; 3.School of Electronic Science and Engineering, University ofElectronic Science and Technology of China, Chengdu 611731 , China

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    摘要:

    为了满足窄带声表面波滤波器对品质因数Q 值和带外抑制日益增长的需求,提出了一种窄带滤波器设计方法。在基于新型POI结构谐振器的基础上,通过旋转谐振器达到改变波传播角度的目的,并利用二维全模型得到准确的实验数据,与原结构谐振器分别代入滤波器设计中进行比较。实验结果表明,该方法在一定程度上能够有效地增加带外抑制,对过渡带抑制能力有2~4 dB的提升,且具有设计简便,占用空间小等优点。

    Abstract:

    To meet the increasing demand for Q-value and out-of-band suppression in narrowband surface acousticwave filters, this paper proposes a design method based on a new type of piezo on insulator (POI) structure resonator.The purpose of changing the wave propagation angle is achieved by rotating the resonator, and accurate experimentaldata are obtained using a two-dimensional full model, which is compared with the original structure resonatorin the filter design. The experimental results show that this method can effectively increase out-of-band suppression,with a 2-4 dB improvement in transition band suppression ability. Additionally, the design is simple andrequires little space

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朱建宇,魏子杰,范维,李沛然,钱一聪,帅垚,吴传贵,罗文博,潘忻强,张万里.面内传播方向对SAW滤波器性能的影响研究[J].压电与声光,2024,46(4):435-438. ZHU Jianyu, WEI Zijie, FAN Wei, LI Peiran, QIAN Yicong, SHUAI Yao, WU Chuangui, LUO Wenbo, PAN Xinqiang, ZHANG Wanli. Influence of In-Plane Propagation Direction on the Performance of Surface Acoustic Wave Filters[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2023-12-26
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  • 在线发布日期: 2024-08-29
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