基于多孔氧化铝的高品质因数QCM湿度传感器的研究
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南京工业大学 电气工程与控制科学学院,江苏 南京 211816

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潘宇(1999-),男,江苏省南京市人,硕士生。通信作者:蒋书波(1975-),女,副教授,博士。

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High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide
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College of Electrical Engineering and Control Science, Nanjing Technology University, Nanjing 211816 ,China

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    摘要:

    石英晶体微天平(QCM)传感器以频率形式输出信号,具有成本低、响应快、灵敏度高等优点,因而使用多孔α-Al2O3 作为湿敏材料来提高QCM 传感器对湿度的检测灵敏度。基于QCM 传感原理,通过COMSOL软件研究不同结构尺寸对传感器谐振频率、品质因数、导纳的影响,优化传感器的几何参数。探究传感器在一定湿度范围内的灵敏度和动态特性,实验结果表明,该传感器具有显著的湿度辨别能力,最大频率响应可达到13 kHz,灵敏度为155 Hz/(%RH),响应、恢复时间分别为20 s和8 s。因此,使用多孔α-Al2O3 作为湿敏材料的QCM 传感器在湿度检测方面具有一定的可靠性和准确性。

    Abstract:

    The output of quartz crystal microbalance (QCM) sensors is in the form of frequency signals. Thesesensors offer advantages such as low cost, fast response, and high sensitivity. This study utilized porous α-Al2O3,a moisture-sensitive material, to enhance the humidity detection sensitivity of QCM sensors. Simulations were performedusing COMSOL, by applying the QCM sensing principle, to investigate the influence of various structuraldimensions on the sensor’s resonant frequency, quality factor, and admittance, while optimizing its geometric parameters.Subsequently, the sensitivity and dynamic characteristics of the sensor were examined over a specific humidityrange. The experimental findings demonstrate the remarkable humidity discrimination capability of the sensor,with a maximum frequency response of 13 kHz, sensitivity of 155 Hz/(%RH), and response and recoverytimes of 20 s and 8 s, respectively. These results demonstrate the reliability and accuracy of the QCM sensor, utilizingporous α-Al2O3 as the moisture-sensitive material, in humidity detection.

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潘宇,蒋书波,陈惠.基于多孔氧化铝的高品质因数QCM湿度传感器的研究[J].压电与声光,2024,46(4):487-490. PAN Yu, JIANG Shubo, CHEN Hui. High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-04-03
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  • 在线发布日期: 2024-08-29
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