基于ScAlN薄膜的高频PMUT阵列的设计与制造
作者:
作者单位:

1.长春理工大学 机电工程学院,吉林 长春 130012 ;2.中国科学院 苏州纳米技术与纳米仿生研究所,江苏 苏州 215123 ;3.中国科学院 多功能材料与轻巧系统重点实验室,江苏 苏州 215123 ;4.中国科学技术大学 纳米技术与纳米仿生学院,安徽 合肥 230026 ;5.上海大学 理学院,上海 200072

作者简介:

塔桂峰(1999-),男(满),吉林省长春市人,硕士生。

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基金项目:

苏州市科技计划基金资助项目(SSD2023001);国家自然基金资助项目(62074159);国家重点研发计划基金资助项目(2021YFB3201600)

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Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film
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Affiliation:

1.School of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012 , China ;2.Suzhou Institute of Nano-Tech and Nano-Bionics(SINANO),Chinese Academy of Sciences, Suzhou 215123 , China ;3.Key Laboratory of Multifunctional Nanomaterials and Smart Systems, Chinese Academy of Sciences, Suzhou 215123 , China ;4.School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026 , China ;5.The College of Science, Shanghai University, Shanghai 200072 , China

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    摘要:

    高频压电微机械超声换能器(PMUT)应用于各种场景,如指纹识别、无损检测、医疗成像。在当前非侵入式血管成像应用中,存在换能器使用锆钛酸铅压电陶瓷(PZT)及局限于1-D PMUT阵列的问题。设计并制作了一种基于ScAlN材料压电薄膜的2D-PMUT阵列。为了进一步得到阵列最佳的输出性能,降低栅瓣影响,设计了间距为波长的1/2(300 μm)的并联六边形阵列,增大了填充因子,降低了阻抗,提高了输出电流。采用SOI晶片作为PMUT的基本结构,设计了微机电系统(MEMS)工艺流程,并完成了晶片制作。通过扫描电子显微镜和聚焦离子束切割确定PMUT的形貌和结构尺寸,并且测得在水中的谐振频率为2.36 MHz。仿真与测试结果表明,测试误差为9.2%,位移灵敏度较好,有望满足非侵入式血管成像应用需求。

    Abstract:

    High-frequency piezoelectric micromechanical ultrasonic transducers (PMUTs) are employed in variousapplications including fingerprint recognition, non-destructive testing, and medical imaging. In this study, thechallenges associated with using lead zirconate titanate piezoelectric ceramics (PZT) in non-invasive vascular imagingand limitations of 1-D PMUT arrays are addressed by designing and fabricating a 2D PMUT array based on ScAlNpiezoelectric film. To optimize output performance and minimize gate lobe influence, a parallel-hexagon array is designedwith a spacing of half a wavelength (300 μm) to enhance the filling factor, reduce impedance, and improveoutput current. A silicon-on-insulator (SOI) wafer is utilized as the substrate for the PMUT, facilitating the MEMSprocess flow and wafer fabrication. The morphology and structure size of the PMUT are characterized using scanningelectron microscopy and focused ion beam cutting. The measured resonant frequency in water is 2.36 MHz,with a simulation-test discrepancy of 9.2% and satisfactory displacement sensitivity, suggesting its suitability fornon-invasive vascular imaging applications.

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塔桂峰,刘建河,李加东,姚术涛,刘浩杰,苗斌,商文玲,陶金燕.基于ScAlN薄膜的高频PMUT阵列的设计与制造[J].压电与声光,2024,46(4):496-504. TA Guifeng, LIU Jianhe, LI Jiadong, YAO Shutao, LIU Haojie, MIAO Bin, SHANG Wenling, TAO Jinyan. Design and Fabrication of High-Frequency PMUT Array Based on an ScAlN Thin Film[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-04-23
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  • 在线发布日期: 2024-08-29
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