基于COM-MBVD混合模型的多模态声学响应研究与仿真
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1.重庆邮电大学 光电工程学院,重庆 400065 ;2.电子科技大学 重庆微电子产业技术研究院,重庆 401332 ;3.电子科技大学 电子科学与工程学院,四川 成都 611731

作者简介:

周艺蒙(1999-),男,四川省广安市人,硕士生。帅垚(1983-),男,副教授,博士。

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四川省科技计划基金资助项目(2020YFJ0002)

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Research and Simulation of Multi-Modal Acoustic Response Based on COM-MBVD Hybrid Modeling
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Affiliation:

1.College of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing 400065 ,China ;2.Chongqing Institute of Microelectronics Industry Technology,University of ElectronicsScience and Technology of China, Chongqing 401332 ,China ; 3.School of Electronics Science and Engineering,University of Electronics Science and Technology of China,Chengdu 611731 ,China

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    摘要:

    耦合模(COM)模型广泛应用于声表面波(SAW)滤波器设计中,传统的单模COM 模型不能拟合到远端的高阶水平剪切波、西沙瓦波等杂散模态。从单模COM 模型出发,结合类似于MBVD等效电路的谐振支路,实现COM-MBVD模型拟合多模态声学响应。并基于此模型搭建8阶梯形结构电路进行优化仿真。最终设计出中心频率为1 590 MHz,通带插入损耗小于1.6 dB,带内波动为1 dB,带宽为80 MHz(相对带宽为5%)的声表面波(SAW)滤波器。实际测试数据与仿真数据相符,验证了该设计方法的可行性。

    Abstract:

    The coupling-of-modes (COM) model is extensively used in the design of surface acoustic wave(SAW) filters. However, the conventional single-mode COM model is insufficient for accounting for spuriousmodes, such as higher-order horizontal shear waves and Sezawa waves at the far end. In this study, we first usedthe single-mode COM model and integrated it with a resonant branch similar to the MBVD equivalent circuit to establishthe COM-MBVD model for accommodating the multi-modal acoustic response. Subsequently, an 8th-orderladder structure circuit was constructed for optimization simulation, following this model. The final configurationresulted in a SAW filter with a central frequency of 1 590 MHz, a passband insertion loss below 1.6 dB, an in-bandfluctuation of 1 dB, and a bandwidth of 80 MHz (equivalent to a relative bandwidth of 5%). The alignment betweenthe test and simulation data confirms the viability of the design approach.

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周艺蒙,陈抒键,蒋冠臻,范维,魏子杰,李沛然,帅垚,吴传贵,罗文博,潘忻强,张万里.基于COM-MBVD混合模型的多模态声学响应研究与仿真[J].压电与声光,2024,46(4):519-523. ZHOU Yimeng, CHEN Shujian, JIANG Guanzhen, FAN Wei, WEI Zijie, LI Peiran, SHUAI Yao, WU Chuangui, LUO Wenbo, PAN Xinqiang, ZHANG Wanli. Research and Simulation of Multi-Modal Acoustic Response Based on COM-MBVD Hybrid Modeling[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-01-30
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  • 在线发布日期: 2024-08-29
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