MEMS压电矢量水听器低噪声前置放大电路
作者:
作者单位:

1.中国科学院 声学研究所 声场声信息国家重点实验室,北京 100190 ;2.中国科学院大学,北京 100049

作者简介:

邓威(1998-),男,重庆市云阳区人,硕士生。

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基金项目:

国家自然科学基金资助项目(12174420,11874388);中国科学院声学研究所自主部署“目标导向”类项目(MBDX202112)和“前沿探索”类项目(QYTS202002)

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Low-Noise Preamplifier Circuit for MEMS Piezoelectric Vector Hydrophone
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Affiliation:

1.State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190 , China ;2.University of Chinese Academy of Sciences, Beijing 100049 , China

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    摘要:

    等效自噪声是微机电系统(MEMS)压电矢量水听器重要的性能指标,前置放大电路的噪声是其主要来源之一。为降低MEMS压电矢量水听器的自噪声,设计了一种低噪声前置放大电路。采用双JFET并联电路结构,辅以合适的偏置电路,对不同噪声源进行理论分析,优化电路参数,最终实现了噪声性能较优的低噪声前置放大电路的设计与制备。测试结果表明,在MEMS压电矢量水听器的工作频带内,低噪声前置放大电路信号放大无失真,电压增益为43.8 dB,等效输入噪声电压谱密度为0.7 nV/ Hz@1 kHz,其噪声性能较国内外同类型的放大电路具有一定优势。

    Abstract:

    Equivalent self-noise is an important performance indicator for micro-electromechanical systems(MEMS) piezoelectric vector hydrophones, and the noise of the preamplifier circuit is an important consideration.This study entailed the design of a low-noise preamplifier circuit to reduce the self-noise of MEMS piezoelectric vectorhydrophones. By using a circuit structure with dual junction field-effect transistors (JFETs) in parallel and supplementingit with appropriate bias circuits, a theoretical analysis of different noise sources was conducted to optimizethe circuit parameters. The design and fabrication of a low-noise preamplifier circuit with superior noise performancewere ultimately achieved. The test results show that, within the operating frequency band of the MEMSpiezoelectric vector hydrophone, the low-noise preamplifier circuit amplifies signals without distortion, with a voltagegain of 43.8 dB and an equivalent input noise voltage spectral density of 0.7 nV/ Hz@1 kHz. This noise performanceprovides evident advantages over similar amplification circuits domestically and internationally.

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邓威,樊青青,李俊红,马军,孔超. MEMS压电矢量水听器低噪声前置放大电路[J].压电与声光,2024,46(4):550-554. DENG Wei, FAN Qingqing, LI Junhong, MA Jun, KONG Chao. Low-Noise Preamplifier Circuit for MEMS Piezoelectric Vector Hydrophone[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-04-11
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  • 在线发布日期: 2024-08-29
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