尺蠖式压电陶瓷电机的双模式驱动器开发与研究
作者:
作者单位:

1.复旦大学 集成电路与系统国家重点实验室,上海 200433 ;2.复旦大学 上海市超精密检测运动与控制中心,上海 200433

作者简介:

韩硕(1994-),男,黑龙江省哈尔滨市人,博士生。

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基金项目:

国家重点研发计划基金资助项目(2021YFA1200603);广东省实验室季华实验室项目资助(18002U1Z00)

伦理声明:



Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor
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Affiliation:

1.State Key Lab.of Integrated Chips and Systems, School of Fudan University, Shanghai 200433 , China ;2.Shanghai Engineering Research Center of Ultra-Precision Motion Control and Measurement,School of Fudan University, Shanghai 200433 , China

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    摘要:

    尺蠖式压电陶瓷电机具有小尺寸,长行程,纳米级定位和大推力的特性,被广泛应用于集成电路装备和精密运动平台中。然而目前受其驱动器约束,难以实现长行程运动时高精度定位、位移可控和速度可控,因而无法应用到具有高推力、高速度和长行程纳米级精度定位的集成电路7 nm 工艺IC芯片检测装备中。提出并开发了一种双模式驱动器,基于电荷效应和应力效应原理分别建立了位移-电压和速度-频率的控制模型。采用滑模控制的方法解决了在双模式驱动器大电压输出时的纹波问题,提高了尺蠖式压电陶瓷电机输出的位移分辨率。通过实验对双模式驱动器进行了硬件性能和控制模式验证,同时验证了尺蠖式压电陶瓷电机的运动特性。

    Abstract:

    Inchworm piezoelectric ceramic motors (IWPECMs), known for their small size, long stroke, nanopositioning,and large thrust characteristics, are widely used in integrated circuit equipment and precision motionplatforms. However, current IWPECMs struggle to achieve high-precision positioning and controllable displacementand velocity over long-stroke movements with existing drivers. As a result, they cannot be applied to 7 nm technologyintegrated circuit (IC) chip testing equipment that requires high speed and nano-positioning. To address theseissues, a dual-mode driver is proposed and developed. This dual-mode driver includes displacement-voltage and velocity-frequency modes, which are based on the principles of charge and stress effects, respectively. The slidingmode control (SMC) method is used to reduce the voltage ripple when the dual-mode driver outputs high voltage,thereby improving the displacement resolution of the IWPECM. Finally, the hardware performance and dual-modecontrol of the driver were verified through experiments, further testing the performance of IWPECM.

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引用本文

韩硕,杨晓峰.尺蠖式压电陶瓷电机的双模式驱动器开发与研究[J].压电与声光,2024,46(4):562-569. HAN Shuo, YANG Xiaofeng. Development of Dual-Mode Driver for Inchworm Piezoelectric Ceramic Motor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-04-06
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  • 在线发布日期: 2024-08-29
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