Abstract:In this study, based on the modular design concept, an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot. The mobile robot is composed of four circumferentially distributed L type piezoelectric actuators and connecting platforms.This contribution representsa simple and compact structurede signed to achieve a significant range of high-precision motion in a 2-DOF plane. The mobile robot was processed and assembled, and a test platform was developed to investigate its motion output characteristics. Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision, speed, and stability, and strong carrying capacity. Its motion resolution, maximum motion speed, and carrying ca pacitywere 1 μm, 46 mm/s, and 75 g, respectively. Finally, the proposed mobile robot has broad application pros pects in terms of micro and nano operations, wafer defect detection, and ultra-precision machining