一种基于惯性致动的四足压电移动机器人研究
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作者单位:

中北大学 先进制造技术山西省重点实验室,山西 太原 030051

作者简介:

李运菲(2000-),男,河南省南阳市人,硕士生。

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基金项目:

国家自然科学基金(51975540);先进制造技术山西省重点实验室(中北大学)2022年度开放基金(XJZZ202202);山西省基础研究计划项目(202203021222041)

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Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation
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Affiliation:

Shanxi Key Laboratory of Advanced Manufacturing Technology, North University of China, Taiyuan 030051 , China

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    摘要:

    设计了一种基于压电双晶梁的L型压电驱动器,基于模块化设计思想将L型压电驱动器应用于压电移动机器人的研制。压电移动机器人由4个周向分布的L型压电驱动器和连接平台组成,结构简单紧凑,可实现2 自由度平面内大范围高精运动。对压电移动机器人进行加工和装配,并搭建测试平台对压电移动机器人的运动输出特性进行实验研究。测试结果表明,压电移动机器人具有兼顾高精度、快速度、高稳定性和强承载能力的良好综合性能,其运动分辨率为1 μm,最大运动速度可达46 mm/s,承载能力可达75 g,在微纳操作、晶圆缺陷检测和超精密加工领域具有广阔的应用前景。

    Abstract:

    In this study, based on the modular design concept, an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot. The mobile robot is composed of four circumferentially distributed L type piezoelectric actuators and connecting platforms.This contribution representsa simple and compact structurede signed to achieve a significant range of high-precision motion in a 2-DOF plane. The mobile robot was processed and assembled, and a test platform was developed to investigate its motion output characteristics. Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision, speed, and stability, and strong carrying capacity. Its motion resolution, maximum motion speed, and carrying ca pacitywere 1 μm, 46 mm/s, and 75 g, respectively. Finally, the proposed mobile robot has broad application pros pects in terms of micro and nano operations, wafer defect detection, and ultra-precision machining

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李运菲,祝锡晶,李婧,高国栋.一种基于惯性致动的四足压电移动机器人研究[J].压电与声光,2024,46(5):741-746. LI Yunfei, ZHU Xijing, LI Jing, GAO Guodong. Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-05-21
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  • 在线发布日期: 2023-11-06
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