声表面波气体传感器研究进展
作者:
作者单位:

1.中国科学院声学研究所,北京 100190 ;2.中国科学院大学,北京 100190

作者简介:

崔柏乐(1997-),男,博士研究生。通信作者:王文(1976-),研究员,博士生导师。

通讯作者:

基金项目:

国家重点研发计划国际合作专项(2024YFE0199800)

伦理声明:



Review of Surface Acoustic Wave-Based Gas Sensor
Author:
Ethical statement:

Affiliation:

1.Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190 , China ; 2.University of Chinese Academy of Sciences, Beijing 100190 , China

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    摘要:

    声表面波(SAW)气体传感器以其独特的微纳声学传感结构和力-声-电多物理场耦合传感机制,表现出高灵敏度、快速响应、宽量程及微型轻质等特点,逐渐成为广受人们关注的新兴气体传感技术之一。该文从 SAW传播及传感理论出发,详细介绍敏感膜式与非敏感膜式SAW气体传感效应及机制、传感器件设计与制备、传感信号采集与处理等相关研究进展,探讨了SAW气体传感器在新能源、航空航天、国防、工业控制及智能制造等众多领域的潜在应用,最后对其发展趋势进行了展望。

    Abstract:

    Surface acoustic wave (SAW) gas sensing technology has the characteristics of high sensitivity, fast response, miniaturization and lightweight because of its unique acoustic sensing structure and force-acoustic-electric physical field coupling sensing mechanism, which makes it gradually become one of the emerging gas sensing tech nologies that people pay close attention to. Based on the SAW propagation and sensing theory, this paper introduces in detail the research progress of SAW gas sensing effect and mechanism, sensor device design and preparation, sen sor signal acquisition and processing, etc. Besides, the potential application of SAW gas sensors in many fields such as new energy, aerospace, national defense, industrial control and intelligent manufacturing and its development trend are discussed.

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崔柏乐,杨启明,王文.声表面波气体传感器研究进展[J].压电与声光,2024,46(6):827-839. CUI Baile, YANG Qiming, WANG Wen. Review of Surface Acoustic Wave-Based Gas Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-11-05
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  • 在线发布日期: 2023-11-06
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