二维双通路正交式声表面波矢量磁场传感器
作者:
作者单位:

1.中国科学院声学研究所,北京 100190 ;2.中国科学院大学,北京 100190

作者简介:

吴雨桐(1999-),女,北京市人,博士生。通信作者:王文(1976-),研究员,博士生导师。

通讯作者:

基金项目:

国家自然科学基金(No.12204510);国家基础加强技术领域基金项目(2022YFB3206802)

伦理声明:



A Two-Dimensional Dual-Path Orthogonal Surface Acoustic Wave Vector Magnetic Field Sensor
Author:
Ethical statement:

Affiliation:

1.Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190 , China ; 2.University of Chinese Academy of Sciences, Beijing 100190 , China

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    摘要:

    声表面波(SAW)矢量磁场传感器因对空间磁场方向具有高度指向性而展现出良好的应用前景。然而单通路传感器存在的响应随机性和可靠性较低等问题,限制了其在精确磁场测量中的应用。针对高灵敏空间矢量磁场的检测需求,提出了一种高灵敏的SAW矢量磁场传感器及二维双通路正交式结构设计方法。该传感器采用平面半导体工艺在ST-90°X石英基底上沉积金属铝叉指换能器,形成延迟线结构,并利用磁控溅射技术在声传播路径上沉积各向异性的钴铁硼(CoFeB)磁敏薄膜。实验结果表明,所设计的200 MHz SAW磁场传感器在SAW传播方向与外加磁场垂直时,其相位响应灵敏度为55.214 (°)/Oe,且在不同方向磁场下差异明显,展现出良好的重复性与稳定性。二维双通路正交式结构保持了单通路元件的高灵敏度特性,为实现高精度二维全平面磁场检测提供了新的思路与方案。

    Abstract:

    Surface acoustic wave (SAW) vector magnetic field sensors demonstrate considerable potential for a range of applications, given their ability to respond with high directionality to the direction of the magnetic field in space. However, single-pass sensors are afflicted with issues such as response randomness and low reliability, which restrict their deployment in precise magnetic field measurements. In response to the need for high-sensitivity SAW magnetic field sensors for the detection of space vector magnetic fields, this study proposes a highly sensitive SAW vector magnetic field sensor and a two-dimensional dual-path orthogonal structure. The sensor employs a pla nar semiconductor process to deposit a metallic aluminum transducer on an ST-90°X quartz substrate, thereby form ing a delay line structure. Additionally, an anisotropic CoFeB magneto-sensitive thin film is incorporated into the a coustic propagation path through magnetron sputtering. The experimental results demonstrate that the designed 200 MHz SAW magnetic field sensor exhibits a phase response sensitivity of 55.214 (°)/Oe when the SAW propagation direc tion is perpendicular to the applied magnetic field. Furthermore, the directional phase response exhibits a notable difference under different directional magnetic fields, and the sensor demonstrates good repeatability and stability. The two-dimensional dual-path orthogonal structure preserves the high sensitivity characteristics of the single-path element, offering a novel approach to achieve high-precision two-dimensional all-plane magnetic field detection.

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引用本文

吴雨桐,贾雅娜,王文.二维双通路正交式声表面波矢量磁场传感器[J].压电与声光,2024,46(6):860-864. WU Yutong, JIA Yana, WANG Wen. A Two-Dimensional Dual-Path Orthogonal Surface Acoustic Wave Vector Magnetic Field Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-11-05
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  • 在线发布日期: 2023-11-06
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