一种高精度声表面波扭矩传感器
作者:
作者单位:

1.上海理工大学 光电信息与计算机工程学院,上海 200093 ;2.上海交通大学 感知科学与工程学院,上海 200240 ; 3.中国电子科技集团公司第二十六研究所,重庆 400060 ;4.无锡好达电子有限公司,江苏 无锡 214124

作者简介:

周硕(2000-),男,山东省菏泽市人,硕士生。通信作者:范彦平,男,浙江省兰溪市人,博士,副教授。

通讯作者:

基金项目:

国家自然科学基金(51705326,52075339)

伦理声明:



A High Performance SAW Torque Sensor
Author:
Ethical statement:

Affiliation:

1.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093 , China ; 2.School of Perception Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240 , China ; 3.The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060 , China ; 4.Wuxi Haoda Electronics Co., Ltd., Wuxi 214124 , China

Funding:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
    摘要:

    扭矩测量是衡量动力系统输出功率是否满足运行指标的重要手段,是动力设备运行状态和故障预警的关键信息来源。声表面波(SAW)传感器无源无线的特点有利于旋转工况下的转轴扭矩测量,避免了有源扭矩传感器在扭矩测量中能量和信号难以传输的问题。为实现高精度的声表面波扭矩传感,从压电基底材料选择、高品质因数(Q)值谐振器设计以及高精度SAW传感器回波信号频率解调算法三方面考虑,设计了一种高精度声表面波扭矩传感器。对所设计的声表面波扭矩传感器进行测试,结果表明,扭矩传感器的加载非线性误差为0.183%, 卸载非线性误差为0.160%,加载重复性为0.260%,卸载重复性为0.103%,迟滞为0.299%,实现了一种高精度的无源扭矩传感。

    Abstract:

    Torque measurement is an essential method for assessing whether the output power of a power system meets operational requirements, serving as a critical source of information for equipment operational status and fault pre-warning. Surface Acoustic Waves (SAW) sensors, with their passive and wireless characteristics, are particu larly well-suited for torque measurement of rotating shafts, overcoming the challenges in energy and signal trans mission encountered with active torque sensors in rotational applications. To achieve high-precision SAW torque sensing, this study focuses on the selection of piezoelectric substrate materials, the design of high-Q resonators, and the development of a high-accuracy frequency demodulation algorithm for SAW sensor echo signals. The designed SAW torque sensor was tested, achieving a load nonlinearity of 0.183%, unload nonlinearity of 0.160%, load re peatability of 0.260%, unload repeatability of 0.103%, and hysteresis of 0.299%, thereby demonstrating high-pre cision torque sensing capabilities.

    参考文献
    相似文献
    引证文献
引用本文

周硕,高孜航,肖强,王为标,范彦平.一种高精度声表面波扭矩传感器[J].压电与声光,2024,46(6):865-870. ZHOU Shuo, GAO Zihang, XIAO Qiang, WANG Weibiao, FAN Yanping. A High Performance SAW Torque Sensor[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
历史
  • 收稿日期:2024-11-02
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2023-11-06
  • 出版日期: