双电极叉指换能器声表面波低温传感器的设计与仿真分析
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中北大学 省部共建动态测试技术国家重点实验室,山西 太原 030051

作者简介:

叶梦莹(2000-),女,山西省运城市人,硕士生。通信作者:崔永俊(1973-),男,博士,教授。

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山西省基础研究计划项目(20210302123034)

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Design and Simulation Analysis of Surface Acoustic Wave Cryogenic Sensors with Double-Electrode Interfingered Transducer
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State Key Laboratory of Dynamic Testing Technology, North University of China, Taiyuan 030051 , China

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    摘要:

    为了应对低温环境下的温度测试需求,设计了一种具有双电极叉指换能器(IDT)的128°YX-LiNbO3 延迟线型声表面波(SAW)温度传感器。利用COMSOL软件搭建了温度传感器模型,确定了传感器的最佳模型参数,并在-196~100 ℃对传感器进行仿真测试。结果表明,采用双电极叉指结构的传感器的机电耦合系数达到 5.35%,同时传感器的谐振频率与温度呈现出良好的线性关系,温度灵敏度为26.2 kHz/℃,频率温度系数达到-83.4×10-6/℃,证明了LiNbO3 在低温环境下的可靠性。

    Abstract:

    A 128°YX-cut lithium niobate (LiNbO3 ) delay-line-type surface acoustic wave (SAW) temperature sensor with a dual-electrode interdigitated transducer (IDT) was designed to meet the demand for temperature measurements in low-temperature, harsh environments. A temperature-sensor model was built using COMSOL software, and the optimal model parameters were determined. The sensor was tested within a temperature range of -196 ℃ to 100 ℃. According to the simulation results, the electromechanical coupling coefficient of the sensor with the dual-electrode finger structure was 5.35%. Moreover, the sensor’s resonance frequency exhibits a strong linear relationship with temperature, with a temperature sensitivity of 26.2 kHz/℃ and a frequency temperature co efficient of -83.4×10-6/℃, demonstrating the reliability of LiNbO3 in low-temperature environments.

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叶梦莹,崔永俊,王红亮.双电极叉指换能器声表面波低温传感器的设计与仿真分析[J].压电与声光,2024,46(6):871-877. YE Mengying, CUI Yongjun, WANG Hongliang. Design and Simulation Analysis of Surface Acoustic Wave Cryogenic Sensors with Double-Electrode Interfingered Transducer[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-07-30
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  • 在线发布日期: 2023-11-06
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