大行程-高频响压电驱动纳米定位平台优化设计
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陕西科技大学 机电工程学院,陕西 西安 710021

作者简介:

张萌(1990-),男,山西省临汾市人,副教授,博士。

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基金项目:

陕西省自然科学基金(2023-JC-QN-0408);陕西高校青年创新团队(2024);陕西省教育厅专项科研计划项目(23JK0348);西安市科技计划高校院所科技人员服务企业项目(2023JH-GXRC-0160)

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Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform
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College of Mechanical and Electrical Engineering, Shaanxi University of Science & Technology, Xi’an 710021 , China

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    摘要:

    针对原子力显微镜的扫描范围和扫描速度受限于柔性机构的工作行程和固有频率,而柔性机构在设计时难以兼顾大工作行程和高固有频率的问题,基于桥式放大机构设计了一款纳米定位平台,并对其构型和主要参数进行优化。首先研究了柔性臂数量和厚度对桥式机构固有频率及放大比的影响,建立了新型双桥式柔性放大机构构型;然后基于矩阵位移法实现了纳米定位平台离散化,构建纳米定位平台整体刚度矩阵及系统的力学模型; 最后针对纳米定位平台的频响和行程对柔性放大机构的主要参数进行优化分析与仿真分析。仿真结果表明,优化后的压电驱动纳米定位平台的一阶固有频率为4.4 kHz,工作行程超过30 μm×30 μm。

    Abstract:

    The scanning range and scanning speed of the atomic force microscope are limited by the size of the working stroke and intrinsic frequency of the flexible mechanism; however, it is challenging for the flexible mecha nism to account for the large working stroke and high intrinsic frequency in the design to solve the problem. This study proposes a nanopositioning platform based on the bridge-type amplification mechanism and optimizes its con figuration and main parameters. First, a new type of double-bridge flexible amplification mechanism is established through the study of the influence of the number and thickness of flexible arms on the intrinsic frequency and ampli fication ratio of the bridge mechanism. Subsequently, the discretization of the nanopositioning platform is realized based on the matrix displacement method, and the overall stiffness matrix of the nanopositioning platform and the mechanical model of the system are constructed. Finally, the optimization of the main parameters of the flexible am plification mechanism is carried out with respect to the frequency response and the stroke of the nanopositioning platform, and simulation analysis is performed. Finally, the main parameters of the flexible amplification mecha nism are optimized for the frequency response and travel of the nanopositioning platform and simulated. The simula tion results show that the optimized piezoelectric-driven nanopositioning platform has a first-order intrinsic frequency of 4.4 kHz and a working travel of more than 30 μm×30 μm.

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张萌,刘时成,张松林,朱禹清,吴垚.大行程-高频响压电驱动纳米定位平台优化设计[J].压电与声光,2024,46(6):934-941. ZHANG Meng, LIU Shicheng, ZHANG Songlin, ZHU Yuqing, WU Yao. Optimized Design of a Large Stroke-High Frequency Piezoelectric Driven Nanopositioning Platform[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 收稿日期:2024-07-17
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  • 在线发布日期: 2023-11-06
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