Love wave mode based on waveguide with shear horizontal polarization and normal to propagation direction, is suitable for sensing liquid media due to low propagation loss occurred on its propagation route. The love wave excited and propagated on quartz surface and deposited SiO2 film on it is very sensitive to the mass change of SiO2. In this paper, humidity sensor for measuring humidity in atmosphere based on love wave mode on 42.75°Y-rotated cut quartz substrate with the propagation direction of [0°,132.75°,90°] with SiO2 waveguide layer deposited by APCVD is presented. Sensitivities of about 62 kHz/%RH for humidity were obtained. And maximum hysteresis is about 3%. Detail fabrication process corresponding to this type of sensors is reported.