微机械开放式z轴射流陀螺敏感机理的研究
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国家自然科学基金资助项目(60772012);北京市自然科学基金重点项目&北京市教委科技计划重点基金资助项目(KZ201511232034);北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养资助项目;现代测控技术教育部重点实验室资助项目

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Research on the Sensitive Mechanism of Open z-axis Fluidic Gyroscope Based on MEMS
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    摘要:

    揭示了一种基于开放式气流通道的微机械z轴射流陀螺的敏感机理。采用基于流固耦合的三维瞬态有限元分析法,计算了敏感元件内部气流场,并给出了数学模型。计算和测试结果表明:敏感元件内有一开放式的气流通道,分别设置两个入口和一个出口,气流在压电泵的驱动下,由两个入口进入并汇聚,由喷口喷出的气流在射流敏感室形成射流敏感体并从出口流出。在静止条件下,射流敏感体相对热线r1和r2对称分布,作为电桥两个臂的热线r1和r2之间的速度梯度βx=0,电桥平衡,输出电压为0;有角速度输入时,射流敏感体在哥氏力的作用下沿着z轴发生偏转,射流敏感体相对热线r1和r2不再对称分布,βx随着角速度的增加而加大,在其他材料和结果参数不变的情况下,由于射流敏感体与热线r1和r2不对称的热量交换,热线r1和r2的电阻发生不对称的改变,导致电桥失去平衡,电桥输出与输入角速度成正比的不平衡电压。在±120 (°)/s的输入范围内,陀螺灵敏度为20 μV/[(°)·s-1],非线性度优于0.5%,功耗为5.2 mW,热线电阻为3 Ω,热线电阻温度系数为2 600 ℃-1。这种微机械开放式z轴陀螺敏感元件内气流由开放的入口和出口之间形成定向流动,无需气流在敏感元件内循环,敏感元件结构简单。

    Abstract:

    In this paper, we revealed the sensitive mechanism of a MEMS z axis fluidic gyroscope based on the open airflow channel. The 3D transient finite element analysis method based on fluidstructure interaction was used to calculate the airflow field inside of the sensitive element and the numerical model is established. The calculation and test results indicated that: there was an open airflow channel inside of the sensitive element, and two inlets and one outlet were set up. The airflow was driven by the piezoelectric pump and entered from two inlets and was converged.The airflow from the nozzle created a jetsensitive body in the jetsensitive chamber and flew out of the outlet.At the static state, the jetsensitive bodywas symmetrically distributed relative to the hotwires r1 and r2, the speed gradient βx between the hotwires r1 and r2 as the two arms of bridgewas zero. Therefore, the bridge is balanced and output voltage is zero. When the angular velocity was applied, the jetsensitive body was deflected along zaxis under the action of the Coriolisforce; the jetsensitive body was no longer symmetrically distributed with respect to the hotwire r1 and r2, thus the velocity gradient βx between r1 and r2 increased with the increase of the angular velocity. Additionally, at the same condition of other materials and result parameters, the resistance value of two hotwires changed asymmetrically because of the asymmetric heat exchange between r1and r2 and sensitive jet flow.Therefore, the bridge was not balanced anymore and output an unbalanced voltage proportional to applied angular velocity. In the input range of ±120 (°)/s, the sensitivity of gyroscope was 2.0 μV/[(°)·s-1], and simultaneously, the nonlinearity was better than 0.5%. In addition, the power consumption was 5.2 mW, the resistance value R of hotwire was 3 Ω and the temperature coefficient of resistance of hotwire was 2 600/℃.There was a directional flow between two inlets and outlet inside of the sensitive element of this open z-axis gyroscope based on MEMS, without circulation airflow. The sensitive element was simple in structure.

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朴林华,朴然,常兴远,胡永辉.微机械开放式z轴射流陀螺敏感机理的研究[J].压电与声光,2018,40(1):19-23. PIAO Linhua, PIAO Ran, CHANG Xingyuan, HU Yonghui. Research on the Sensitive Mechanism of Open z-axis Fluidic Gyroscope Based on MEMS[J]. PIEZOELECTRICS AND ACOUSTOOPTICS

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  • 在线发布日期: 2018-02-08
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